LPCVD Si₃N₄ on Si (100) Substrates
Price range: £46.99 through £138.99LPCVD Si₃N₄ on Silicon Substrates (Si (100)) Overview Our LPCVD silicon nitride (Si₃N₄) substrates are precision-cut from research-grade Si (100) wafers coated with high-density LPCVD silicon nitride films. LPCVD Si₃N₄ provides excellent film uniformity, high dielectric strength, good mechanical stability, and low defect density, making these substrates suitable for MEMS research, dielectric studies, and microfabrication…


