Silicon on Sapphire (SOS) Wafer
Substrate Specifications (Sapphire / Al₂O₃):
– Material: Al₂O₃ Single Crystal
– Orientation: R-plane (1-102)
– Diameter: 100 mm (Custom cutting to 5x5mm, 10x10mm available)
– Thickness: 460 μm
– Flat: One flat
Epitaxial Layer Specifications (Silicon Film):
– Material: Single Crystal Silicon
– Orientation: (100)
– Type/Dopant: Undoped
– Thickness: 0.6 μm ± 10%
– Resistivity: > 100 ohm-cm
– Micro-particle density (for particles > 2 μm): < 2 cm⁻²
| Option 1 | 10 × 10 mm, 4″ dia, 5 × 5 mm |
|---|---|
| Option 2 | Double-side Polished (DSP), Single-side Polished (SSP) |