Lithium Titanate (Li₄Ti₅O₁₂) Sputtering Target, 99.9% Purity, Circular (Price Upon Request)

Lithium Titanate (Li₄Ti₅O₁₂) Sputtering Target, 99.9% Purity, Circular (Price Upon Request)

Nanostore’s Lithium Titanate (Li₄Ti₅O₁₂) sputtering target is a 99.9% purity battery anode oxide ceramic PVD source material for magnetron sputtering, ion sputtering, and laboratory thin-film deposition. It is supplied in circular target formats for research, development, and small-batch process work. Pricing is provided upon request because final cost depends on selected dimensions and current material market conditions.

Key Features

Source Material
Supplied as 99.9% Purity for thin-film workflows.

Circular Target Formats
Available in circular diameters including 1.97 inch diameter (50 mm), 2 inch diameter (50.8 mm), 2.36 inch diameter (60 mm), 3 inch diameter (76.2 mm), 3.15 inch diameter (80 mm), 4 inch diameter (101.6 mm), 3.94 inch diameter (100 mm). Thickness and mounting options include 3 mm thick, 3 mm + 2 mm Cu backing, 3 mm + 3 mm Cu backing, depending on selected configuration.

Controlled Processing and Inspection
Target preparation may include material selection, forming, heat treatment, machining, dimensional inspection, surface finishing, cleaning, and final quality review. Composition and impurity control may be supported by analytical methods such as ICP, GDMS, carbon/sulfur analysis, oxygen/nitrogen analysis, and metallographic inspection where appropriate.

Clean Handling and Packaging
Targets are prepared for deposition use with clean surface handling and protective packaging. Store sealed in a dry environment, handle with clean gloves, and avoid direct contact with oil, dust, moisture, or other surface contamination before installation.

Technical Specifications

Material: Lithium Titanate (Li₄Ti₅O₁₂)
Purity / Composition: 99.9% Purity
Form: Circular sputtering target
Available Diameters: 1.97 inch diameter (50 mm), 2 inch diameter (50.8 mm), 2.36 inch diameter (60 mm), 3 inch diameter (76.2 mm), 3.15 inch diameter (80 mm), 4 inch diameter (101.6 mm), 3.94 inch diameter (100 mm)
Available Thickness / Backing Options: 3 mm thick, 3 mm + 2 mm Cu backing, 3 mm + 3 mm Cu backing
Equipment: Single-target sputtering systems, multi-target sputtering systems, ion sputtering systems, and magnetron sputtering equipment
Packaging: Protective target packaging for laboratory shipment and storage

Common Applications

– lithium titanate thin-film deposition; thin-film battery anode research; lithium-ion battery material studies; Li₄Ti₅O₁₂ PVD process development
– Academic, industrial, and pilot-scale thin-film process development