Ga₂O₃ Single Crystal Substrate
主な仕様（片面基準）：
– 厚さ：0.5–0.8 mm
– 材質：Gallium Oxide (Ga₂O₃) Single Crystal
– FWHM (arcsec)：≤ 150 arcsec
– 表面タイプ：Single-Sided Polished (SSP), Double-Sided Polished (DSP), Lapping
– 結晶方位：<100>, <001>, <-201>, <010>
– ドーピングタイプと濃度：
1. UID (Unintentionally Doped)：≤ 5E17 cm⁻³
2. Sn-Doped：~ 5E18 cm⁻³
3. Fe-Doped：Semi-insulating
主な用途：
– 光電子デバイス：フォトディテクター、光起電力デバイス、フォトトランジスタ。
– パワーエレクトロニクス：パワー電界効果トランジスタ（FET）、整流器。
– UV LED：殺菌、固体照明、光通信に用いられる UV LED 用基板。
– センサー：環境モニタリング、医療診断、産業制御向けのガスセンサー、圧力センサー、光センサー。
| オプション1 | 1″ dia, (100), Single-Side Polished, 10 × 10 mm, (-201), Double-Side Polished, 10 × 10 mm, (-201), Single-Side Polished, 10 × 10 mm, (001), Double-Side Polished, 10 × 10 mm, (001), Single-Side Polished, 10 × 10 mm, (010), Double-Side Polished, 10 × 10 mm, (010), Single-Side Polished, 10 × 10 mm, (011), Double-Side Polished, 10 × 10 mm, (011), Single-Side Polished, 10 × 10 mm, (100), Double-Side Polished, 10 × 10 mm, (100), Single-Side Polished, 2″ dia, (100), Single-Side Polished, 5 × 5 mm, (-201), Double-Side Polished, 5 × 5 mm, (-201), Single-Side Polished, 5 × 5 mm, (001), Double-Side Polished, 5 × 5 mm, (001), Single-Side Polished, 5 × 5 mm, (010), Double-Side Polished, 5 × 5 mm, (010), Single-Side Polished, 5 × 5 mm, (011), Double-Side Polished, 5 × 5 mm, (011), Single-Side Polished, 5 × 5 mm, (100), Double-Side Polished, 5 × 5 mm, (100), Single-Side Polished |
|---|